MKS AS01496-AB-4 Control Board  

The MKS AS01496-AB-4 control board is a dedicated board for semiconductor equipment, used for MFC flow controller signal processing and gas pressure closed-loop regulation.
Product Features
1. High precision analog acquisition with small reading errors in flow and pressure values
2. Multiple independent signal channels, capable of synchronously controlling multiple groups of gas pipelines
3. Optocoupler isolation circuit, isolating cavity RF electromagnetic interference
4. Multi layer precision wiring with low signal transmission loss and strong stability
5. Standard plug-in card structure, time-saving and convenient cabinet insertion and replacement
6. Built in overcurrent, overvoltage, and short-circuit multiple circuit safety protection
7. Support factory specific communication bus docking with the main control unit of the entire machine
8. Wide temperature substrate adaptation for semiconductor dust-free clean workshop conditions
9. Large area copper laying for heat dissipation, long-term full load not easily prone to high temperature aging
10. Partition layout of strong and weak current lines to avoid signal crosstalk
Product Parameters
1. Model: MKS AS01496-AB-4
2. Core functions: MFC signal acquisition, gas pressure and flow closed-loop control
3. Installation method: Cabinet card insertion installation
4. Working environment: The semiconductor machine operates continuously 24/7 inside
5. Adaptation equipment: Etching and deposition wafer process equipment
The MKS AS01496-AB-4 control board has precise signal processing and strong anti-interference ability, ensuring stable operation of gas processes in semiconductor production lines.