MKS GS53-F05F07-HT Vacuum Pump Actuator Assembly   

The MKS GS53-F05F07-HT vacuum pump actuator component is the core driving component of the vacuum valve, which is resistant to high temperatures and reliable for long-term operation.
Features:

1. The HT high-temperature resistant structure can also work stably in high-temperature process environments.
2. The valve position response is sensitive and the vacuum pressure control is very accurate.
3. Equipped with position feedback, automated monitoring of the production line is more worry free.
4. The sealing is solid and not prone to vacuum leakage.
5. The transmission components are wear-resistant, and frequent opening and closing are also less likely to cause valve jamming.
parameter
6. The maximum temperature resistance is 150 ℃.
7. Support valve position signal output.
8. Pneumatic drive, directly connected to the factory’s conventional gas source.
9. The stainless steel body can withstand mild corrosive gases.
10. Passed CE certification.
Application:
11. Vacuum valve drive for semiconductor wafer equipment.
12. Vacuum pipeline regulation of thin film deposition equipment.
13. Etching equipment process chamber isolation valve.
14. Photovoltaic manufacturing vacuum production line.
15. Laboratory high vacuum testing platform.
Summary: MKS GS53-F05F07-HT is a practical accessory for high temperature and vacuum conditions, making it easy to assemble new machines and replace spare parts on site