MKS T3BIA-27092 high-speed exhaust throttle valve

MKS T3BIA-27092 high-speed exhaust throttle valve
1. Valve control integrated structure, no need for external independent control modules
2. Direct drive baffle structure, fast opening and closing speed throughout the entire stroke, and rapid pressure response
3. Built in self-tuning PID algorithm, small pressure overshoot, quickly reaching the set value
4. Dual channel pressure signal input, automatic range switching, wide pressure control range
5. High precision pressure control ensures the repeatability of semiconductor process pressure
6. Supports two working modes: pressure control and baffle position control
7. Compatible with analog and DeviceNet multiple communication protocols, easy to interface with devices
8. Non volatile local storage, saving parameters when powered off, no need to recalibrate when powered on
9. Built in surge and ESD protection to resist electromagnetic interference in plasma environments
10. Corrosion resistant sealing material, suitable for various corrosive gases in various processes
11. 316L stainless steel valve body, low exhaust gas, reduces the risk of particle pollution
12. Dual relay alarm output, real-time feedback of fault and overpressure status
13. Suitable for vacuum chamber exhaust pressure regulation scenarios such as etching and thin film deposition
14. The valve body can withstand high working temperatures and adapt to chamber heating conditions
15. Modular structure, convenient on-site disassembly and maintenance, reducing downtime
The MKS T3BIA-27092 high-speed exhaust throttle valve is a pressure regulating valve specifically designed for semiconductor vacuum processes, which achieves high-speed and precise adjustment of chamber pressure, ensuring stable production line processes.