MKS T3BIA-28563 Control Valve  

The MKS T3BIA-28563 control valve is a specialized throttling control valve for semiconductor vacuum processes, which achieves closed-loop pressure regulation inside the vacuum chamber.
Product Features
1. Integrated design of valve body drive and control circuit
2. The valve responds quickly and completes pressure regulation quickly
3. Built in adjustment algorithm to reduce pressure overshoot and ensure good process consistency
4. The sealing components have strong corrosion resistance and are compatible with various process gases
5. Supports bus communication and can be connected to the main control unit of the device
6. Equipped with fault status output, facilitating on-site abnormal judgment
7. The overall structure is compact, making it easy to assemble vacuum pipelines on site
8. Anti dust pollution, suitable for clean workshop production environment
9. Supports long-term continuous process operation with strong stability
10. Can be directly used as spare parts for replacing faulty equipment components
Product Parameters
1. Valve form: Integrated vacuum throttling butterfly valve
2. Drive mode: Built in electric actuator
3. Power supply specification: 24V DC power supply
4. Communication type: Industrial bus signal interaction
5. Working conditions: Vacuum pipeline environment of semiconductor equipment
The MKS T3BIA-28563 control valve has reliable pressure regulation accuracy and is widely used for maintenance of semiconductor vacuum equipment and overall machine matching