Details
MKS002-4616-2D2 gas analyzer
Product manual:
MKS 002-4616-2D2 gas analyzer, semiconductor vacuum residual gas detection equipment.
1. Model MKS 002-4616-2D2, used for gas composition detection in vacuum chambers
2. Real time gas sampling, identifying multiple gas components
3. High detection sensitivity, capable of capturing trace impurity gases
4. Industrial components, suitable for long-term operation of semiconductor equipment
5. Equipped with status monitoring, providing feedback on the working status of the instrument
6. Standard hardware interface, easy to disassemble and replace
7. Built in protective circuit to withstand voltage fluctuations
8. Stable data transmission, accurate detection data output
9. Tolerate on-site temperature changes of equipment
10. Compact overall size, suitable for cabinet installation
11. Can coordinate with machine control system for collaborative work
12. Factory calibration completed, ready for immediate use on the machine
13. Metal connectors, reliable contact after multiple insertions and removals
14. Identifiable faults for easy equipment maintenance
15. Used for vacuum leak detection and process gas monitoring
MKS 002-4616-2D2 gas analyzer, replace faulty equipment of the same model to ensure normal vacuum process gas detection
Product details picture:

MKS002-4616-2D 2
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