Newport 0190-22248 Wafer Robot  

Newport 0190-22248 wafer robot adapted to AMAT machine for automatic handling and transfer of 300mm wafers between chambers
Product Features
High positioning accuracy, edge grabbing protection for wafer
Low dust output meets the requirements of clean vacuum environment
Equipped with wafer position detection to prevent collisions
Smooth operation with minimal vibration
Adaptive machine communication with built-in fault diagnosis
Application Areas
PVD magnetron sputtering equipment for wafer transfer
Semiconductor etching equipment for wafer loading and unloading
Internal film transfer in thin film deposition equipment
Wafer testing equipment for wafer handling
Load lock chamber wafer transport
Plasma processing equipment wafer transfer
Metal Chemical Industry Crystal Circular Conveyor
Wafer pre alignment matching transmission
Semiconductor multi cavity machine chip transfer
Chip research and development process, wafer transportation
Overall, Newport 0190-22248 wafer robot has high precision, good cleanliness, and is the core component for 300mm wafer transfer on the AMAT platform