NIKON 4S013-545-2 Stepper Scanner   

The NIKON 4S013-545-2 stepper scanner is a specialized scanning component for Nikon NSR lithography equipment, which completes wafer scanning, acquisition, and alignment work.
Product Features:
Step by step drive mechanism, scanning runs smoothly without shaking
2. High precision optical acquisition, suitable for precise alignment in photolithography
3. Native matching Nikon NSR machine, directly replaceable for use
4. Equipped with self diagnosis, faults can be quickly located and investigated
5. Industrial components, supporting long-term continuous operation of the machine platform
Product Parameters:
1. Compatible models: Nikon NSR series lithography equipment
2. Drive mode: Stepper motor drive
3. Working temperature: 10-40 ℃, used inside the machine cavity
4. Interface: Nikon device specific internal bus
5. Working mode: Step by step scanning acquisition
Application fields:
1. Internal scanning and acquisition of Nikon lithography equipment
2. Semiconductor wafer photolithography alignment detection
3. Replacement of spare parts for the scanning mechanism of the exposure machine
4. Supporting photolithography processes for chip manufacturing
5. Maintenance and renovation of semiconductor equipment
Overall, the NIKON 4S013-545-2 stepper scanner is a critical component of lithography equipment, ensuring the accuracy and stability of wafer scanning and alignment.