Details
Nor Cal 797-209034-001 Pressure Controller
Product manual:
Nor Cal 797-209034-001 pressure controller is a commonly used pressure control unit in semiconductor vacuum processes, used to accurately control the vacuum pressure of the cavity, and is often used in etching and coating equipment
Product Features
1. The control accuracy is very high, and even small pressure changes can be stabilized
3 supports multiple communication methods for easy integration with the upper system
4 independent integrated designs without the need for additional control boards
5 built-in status indicator lights for easy on-site troubleshooting
Product Specifications
Control accuracy reaches 0.2% of full scale
2. Powered by 24V DC
3 supports connecting one to two pressure sensor signals
4. Built in PID closed-loop pressure regulation function
5. Meet the standards for semiconductor cleanroom use
Application Areas
Vacuum pressure control of semiconductor etching chamber
Process pressure regulation of vacuum coating equipment
3. Gas path pressure control of thin film deposition equipment
4. Pressure control of precision vacuum testing system
Replacement of spare parts for 5 semiconductor process machines
This Nor Cal 797-209034-001 pressure controller has precise pressure regulation and fast response, and is often used as a spare part for maintenance and renovation of semiconductor vacuum process equipment
Product details picture:

797-209034-001
product video
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