Novellus 02-252395-00 Digital Power Control System   

Novellus 02-252395-00 Digital Power Control System
1. Closed loop control of heating power in semiconductor CVD thin film deposition chamber
2. Dynamic voltage regulation of RF load output power in wafer coating process
3. Collaborative control of power supply for multiple execution units within the dust-free workshop equipment
4. The chamber pressure is matched with an electromagnetic valve for power output scheduling. This control system can stably control the power output of the entire machine
5. Accurate power allocation of temperature control components during the growth stage of silicon wafer thin films
6. Real time correction of dynamic parameters in the coating process of power semiconductor devices
7. Safety monitoring and control of the power circuit of ALD atomic layer deposition equipment
8. Power supply control of internal servo mechanism in 8-inch wafer production equipment
9. Production line sensor acquisition supporting power supply circuit voltage stabilization and protection
10. Dismantling and replacing core power hardware of old Novellus coating equipment
11. Mini LED chip insulation layer coating machine power overall control
12. Intelligent adjustment of operating power for equipment cooling fans and circulation pumps
13. Power condition debugging of laboratory semiconductor new process testing equipment
14. Real time power-off protection and control for complete machine overload and overcurrent faults
15. Storage and retrieval of power parameters for multiple standardized coating processes
In summary, the Novellus 02-252395-00 digital power control system is the core power control unit of the Nofa thin film deposition equipment, ensuring stable power supply throughout the wafer coating process and precise execution of process parameters.