Novellus 02-293447-00 Digital Dynamic Controller  

The Novellus 02-293447-00 digital dynamic controller is a specialized board for Nofa thin film deposition equipment, which achieves closed-loop dynamic control of chamber process parameters.
Product Features
1. Plug in modular structure, quick disassembly and replacement of cabinet slots
2. High speed signal processing, real-time dynamic correction of process parameter deviations
3. Optoelectronic isolation circuit to resist electromagnetic interference in RF chambers
4. Hardware safety interlock, automatic triggering of protection action under abnormal working conditions
5. Onboard status alarm circuit, convenient for quickly locating equipment faults
Product Parameters
1. Power supply 24VDC, allowing ± 10% voltage fluctuation
2. Multiple analog digital I/O channels to collect pressure and flow signals
3. Working temperature -10 ℃~+60 ℃, suitable for cleanroom cabinets
4. Onboard Flash storage, power off to save multiple sets of process formulas
5. Support device specific bus and interface with the main control unit of the whole machine
Application Areas
Process Control of Novellus CVD Thin Film Deposition Equipment
2. Replacement and maintenance of spare parts for faulty circuit boards in semiconductor production lines
3. Adjustment of process chamber pressure, gas path, and plasma parameters
4. Technical upgrade of semiconductor thin film equipment control system
5. Renovation and commissioning of second-hand Nofa sedimentation equipment
The Novellus 02-293447-00 digital dynamic controller has high process adjustment accuracy, ensuring the stability of thin film deposition production and wafer yield.