RECIF SRT300F60 port single arm wafer transfer tool  

RECIF SRT300F60 port single arm wafer transfer tool
Product Features
RECIF Semiconductor 300mm Wafer EFEM Single Arm Handling Robot
2. Non vacuum edge clamping for wafer removal to avoid particle formation on the wafer surface
3. Integrated wafer gap alignment and wafer ID reading function
4 built-in FFU laminar flow purification to maintain a clean microenvironment
5 servo driven single arm structure completes wafer transfer at high speed and stability
6 supports automatic loading and wafer exchange of FOUP wafer boxes
7. Equipped with safety interlock and quick fault diagnosis for abnormal alarms
8. Compliant with SEMI standards for semiconductor cleanrooms
9. Modular structure maintenance, easy disassembly and assembly
10 commonly used repair and replacement of old wafer guide machines for original wafer transfer units

Application Areas
1 300mm wafer guide machine front-end wafer handling
Semiconductor Etching and Deposition Equipment EFEM Wafer Transport
Port picking and placing operations for wafer sorting equipment
Automatic loading and unloading of wafer inspection equipment
Replacement of spare parts for wafer transfer units in old semiconductor equipment

The RECIF SRT300F60 semiconductor wafer front-end single arm handling unit is compatible with wafer processing equipment