Details
RENISHAW RLD10-X3-DI Fiber Laser Encoder
Product manual:
RENISHAW RLD10-X3-DI fiber laser encoder is widely used in precision equipment for high-precision position feedback, and there is a high demand for maintenance and replacement.
5 product features:
1. Differential interferometry measurement reduces measurement deviation caused by environmental deformation
2. External adjustable beam, no need to disassemble and debug inside the cavity
3. Fiber optic separation structure, separating light source and reading head to reduce heat impact
4. High measurement accuracy, stable nanometer level positioning output
5. Small in size, can be installed in narrow spaces of the cavity
5 product parameters:
1. Maximum measurement range 0-1m
2. Allow maximum movement speed of 1m/s
3. Can achieve high-resolution output of 38.6pm
4. Support the use of vacuum working conditions
5. Need to work together with corresponding laser units
5 application areas:
1. Displacement detection of semiconductor vacuum equipment
2. Precision workpiece table position signal feedback
3. High precision motion platform position measurement
4. Research vacuum equipment measurement scenarios
5. Maintenance and replacement of precision equipment spare parts
RENISHAW RLD10-X3-DI is a practical optical measurement spare part when nanoscale position acquisition is required in a vacuum environment
Product details picture:

RLD10-X3-DI
product video
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