RFVII RF-1-MINI-CB RF Generator

Model:RF-1-MINI-CB
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

RFVII RF-1-MINI-CB RF Generator

Product manual:

RFVII RF-1-MINI-CB small RF generator, plasma chamber high-frequency power supply, compact size, stable output, features as follows:
1. RFVII RF-1-MINI-CB Mini Compact Body, Small Cabinet Easy to Install and Replace
2. Stable output of high-frequency RF energy, ionized gas generation process plasma
3. Built in automatic matching circuit, quickly adapts to cavity loads, with minimal power fluctuations
4. Support pulse adjustable output, precise and controllable frequency and duty cycle parameters
5. Equipped with EMI filtering to resist cavity RF interference and operate without power jumping
6. Integrated multiple protections for overcurrent, overvoltage, overtemperature, and reflected power exceeding limits
7. RS232 serial port+analog remote control, docking device host linkage process
8. Real time collection of reflected power and output power, with panel indicator lights providing intuitive alarms
9. Air cooled cooling structure, controllable temperature rise under full load for 7 × 24 hours for a long time
10. Metal shielding shell, dust-proof and suitable for semiconductor dust-free workshop conditions
11. Pure output waveform, good consistency in etching and coating processes
12. Multiple isolated IO signals can be used for safety interlocking with vacuum valves and chamber doors
13. Standard industrial power supply, suitable for small fluctuations in workshop voltage scenarios
14. Gold plated RF connector, resistant to oxidation and power loss during long-term high-frequency operation
15. Mostly used for small plasma cleaning, thin film deposition, and wafer debonding equipment
ending
RFVII RF-1-MINI-CB has a small size, fast matching, complete protection, and is a small plasma process specific RF power supply.