SMC HRZD020-WS-WS dual channel variable frequency chiller unit  

SMC HRZD020-WS-WS dual channel variable frequency chiller unit
Product Features
SMC HRZD series dual channel independent temperature controlled chiller
2 dual circuit independent temperature control single channel cooling capacity 9.5kW
3 DC variable frequency compressors with variable frequency pumps have lower energy consumption during operation
The temperature control accuracy can reach plus or minus 0.1 degrees Celsius, and the temperature control is stable
5 temperature regulation range -30 to 90 degrees Celsius, suitable for multiple media
6. Support circulation media such as ethylene glycol aqueous solution, fluorinated solution, pure water, etc
Equipped with RS485 RS232 communication interface for easy access to the upper system
8 built-in fault self check function can quickly alarm abnormal states
The compact footprint of the entire machine saves space compared to a single dual machine solution
10 semiconductor workshops that meet SEMI standards have strong adaptability to working conditions

Application Areas
1. Temperature controlled cooling of semiconductor process equipment
Two precision coating equipment with dual channel constant temperature control
3. Cooling and constant temperature system for laser processing equipment
4. Thermal management matching for precision testing instruments
5 Replacement of spare parts for industrial precision process equipment

Dual channel independent temperature controlled cold water equipment SMC HRZD020-WS-WS is suitable for use in semiconductor precision process equipment