SMC NP420-DN1 valve group controller   

SMC NP420-DN1 valve group controller, semiconductor machine pneumatic valve island control unit, centrally controls the action of multiple pneumatic solenoid valves.
Product Features
1. Modular valve island structure, multi station integration saves cabinet installation space
2. Bus communication docking, which can directly and quickly exchange signals with the machine master control
3. Centralized layout of gas circuit to reduce the workload of external gas pipeline wiring
4. The workstation is easy to disassemble and assemble, and single valve components can be replaced and maintained separately
5. Cleanroom adaptation, dust resistance, suitable for long-term operation of semiconductor machines
Product Specifications
1. Working voltage 24VDC
2. Support 16 valve position output stations
3. Working pressure 0-0.5MPa
4. Working temperature 0-60 ℃
5. Adapt to the bus interface of semiconductor equipment
Application Areas
1. Pneumatic circuit control of semiconductor process machine
2. Pneumatic drive for vacuum chamber cylinder and door valve
3. Control of the pneumatic unit of the wafer transfer robot
4. Centralized control of gas path valve island for coating equipment
5. Replacement and maintenance of spare parts for imported semiconductor equipment
When repairing and maintaining the pneumatic system of semiconductor equipment, SMC NP420-DN1 achieves stable centralized control of multiple pneumatic valves.