Spectrum 10513-00R 500362787 RF Generator  

Spectrum 10513-00R 500362787 RF Generator
Product Features
1 MKS ENI Spectrum series semiconductor plasma RF power supply
2 high-power RF outputs for plasma process excitation
3 built-in power closed-loop control, stable and controllable output power
4. Equipped with multiple protection functions such as overcurrent, overheating, standing wave, etc
5 built-in fault diagnosis and status indicator lights for easy troubleshooting
6 rack mounted standard chassis compatible with semiconductor cabinet installation
7 supports remote setting of power and reading status for host communication
8 forced air cooling to meet long-term continuous process operation requirements
9 Impedance matching collaborative control adapted to plasma load changes
10 AMAT equipment matching RF unit commonly used for repairing old equipment

Application Areas
1. Plasma power supply for semiconductor etching process
2 PVD CVD thin film deposition RF source matching
High power RF output of plasma cleaning equipment
4 AMAT Semiconductor Equipment Spare Parts Replacement
5 wafer manufacturing plasma process system supporting

Semiconductor plasma process RF power supply Spectrum 10513-00R 500362787 is compatible with corresponding semiconductor process hosts