Technologies EV-M502NSF-BE Dry Vacuum Pump  

EBARA Technologies EV-M502NSF-BE Dry Vacuum Pump
Product Features
1. Ebara EV-M series multi-stage Roots dry vacuum pump oil-free dry pump design
2 rated pumping speed of 50000 liters per minute, suitable for high flow process gas extraction
The material of the corrosion-resistant pump body can handle process gases containing dust and corrosive substances
4. Intelligent speed regulation automatically adjusts the speed according to the load to reduce energy consumption
5 Water cooling structure operates stably under continuous high temperature conditions
6. Built in complete status monitoring supports alarm information storage and query
7 supports bus communication and can be connected to the upper control system of semiconductor devices
8 comes with multiple protections, overload and over temperature automatic shutdown protection
The compact structure of the whole machine saves installation space in the clean workshop
10 semiconductor production lines that meet SEMI industry standards for long-term stable operation

Application Areas
1. Vacuum extraction for semiconductor thin film deposition process
2 Etching process, heavy processing, vacuum unit matching
Vacuum system for photovoltaic cell production
Manufacturing of LCD panels under high load vacuum conditions
Replacement of old dry pump spare parts in 5 semiconductor factories

The EBARA Technologies EV-M502NSF-BE dry vacuum pump for semiconductor weight processing is compatible with corresponding semiconductor process equipment