TEL 2L80-050254-V1 pressure regulator    

TEL 2L80-050254-V1 is a specialized pressure regulator for Tokyo Electronic Semiconductor Equipment, which achieves closed-loop pressure regulation and gas flow control in the process gas path
Product Features:
1. High precision PID closed-loop regulation, stable pressure output, ensuring consistent gas pressure in semiconductor processes
2. Built in pressure acquisition sensing unit, real-time monitoring of pipeline pressure, fast response and adjustment speed
3. Equipped with overvoltage and undervoltage fault detection, abnormal working condition output alarm signal to protect the machine
4. Anti RF interference design, suitable for strong electromagnetic environment of etching equipment, stable operation
5. Modular integrated unit, easy disassembly and maintenance, reducing equipment downtime for maintenance
Product Parameters:
1. Power supply voltage DC24V
2. Working temperature -10 ℃~+60 ℃
3. Control the process gas of the medium
4. Dedicated internal bus for communication interface equipment
5. Installation form: Modular installation of chassis
Application fields:
1. TEL etching equipment process gas path pressure control unit
2. Semiconductor cavity gas supply pressure regulation module
3. Closed loop control of gas pipelines in wafer process equipment
4. Maintenance and replacement of air circuit spare parts for vacuum process equipment
5. Pressure control of gas supply system for thin film process equipment
TEL 2L80-050254-V1 pressure regulator is suitable for harsh working conditions in semiconductor cleanrooms and is the core component of the machine’s air circuit control