TEL 2L81-050096-V2 gas board PCB  

TEL 2L81-050096-V2 gas board PCB is a dedicated signal board for Tokyo Electronic Gas Box Unit, which controls MFC and solenoid valves, and realizes process gas circuit signal acquisition and output control.
Product Features
1. Multi layer precision PCB, power circuit and analog signal isolation to reduce signal crosstalk
2. Gold plated connectors, anti-oxidation, reliable contact for long-term continuous operation
3. Built in surge and short circuit protection to resist damage to pneumatic components caused by abnormal voltage
4. V2 optimized version, resistant to radio frequency interference, suitable for etching and deposition chamber conditions
5. Standard board size holes, direct alignment, disassembly and replacement of the air box rack
Product Parameters
1. Power supply 24VDC, allowing ± 10% voltage fluctuation
2. Multiple digital and analog I/O channels, connected to MFC and gas solenoid valve
3. Working temperature -10 ℃~+60 ℃, used in a clean cabinet and enclosed environment
4. Onboard status feedback loop, capable of reporting valve flow channel abnormalities
5. Adapt to the internal bus of the device and interact with the main control data of the whole machine
Application Areas
1. Signal control of TEL etching and CVD equipment gas box unit
2. Replacement and maintenance of spare parts for faulty circuit boards in semiconductor production lines
3. Process gas flow rate and valve switch signal processing
4. Troubleshooting and technical upgrade of the pneumatic control subsystem
5. Renovation and debugging of second-hand semiconductor equipment
TEL 2L81-050096-V2 gas board PCB ensures stable process gas ratio and supports wafer process repeatability