TEL 2L81-050105-V2 Printed Circuit Board  

The TEL 2L81-050105-V2 printed circuit board is a signal processing board for the Tokyo Electronic Gas Box System, which completes the collection and forwarding of MFC, pressure sensor, and solenoid valve signals, and interfaces with the equipment controller to achieve closed-loop control of the gas circuit.
Product Features
1. Multi layer partition wiring, strong and weak electrical isolation, reducing signal crosstalk in RF environments
2. Terminal gold plating process, anti-oxidation, stable contact during continuous operation of the cabinet for 7 × 24 hours
3. Onboard surge TVS protection to resist instantaneous voltage surges and protect peripheral components
4. V2 iteration version, enhanced electromagnetic immunity, adapted to RF interference conditions in etching and CVD chambers
5. Standard positioning holes, rack insertion installation, easy and fast on-site disassembly and replacement
Product Parameters
1. Power supply 24VDC, allowing ± 10% voltage fluctuation
2. Multiple analog and digital I/O channels to collect flow, pressure, and valve status signals
3. Working temperature -10 ℃~+60 ℃, for use in clean workshop electrical control cabinets
4. Support internal bus of the device and bidirectional data exchange with the main control of the whole machine
5. Onboard fault feedback loop, reporting abnormal alarm signals for gas path channels
Application Areas
1. TEL etching and thin film deposition equipment gas box unit signal control board
2. Replacement and maintenance of faulty spare parts for semiconductor production lines
3. Collection and processing of process gas flow rate, pressure, and solenoid valve signals
4. Troubleshooting of the pneumatic control subsystem and upgrading of equipment through technological upgrades
5. Renovation and debugging of second-hand semiconductor equipment
TEL 2L81-050105-V2 printed circuit board signal transmission is reliable, ensuring the accuracy of process gas ratio and maintaining wafer process consistency.