TEL 3M80-004350-13 Controller Module  

TEL 3M80-004350-13 is a specialized controller module for Tokyo Electronic Semiconductor Machine, mainly used to control the pneumatic and sensing signals of the cavity. It is a commonly used spare part for wafer equipment maintenance.
1. Multi channel I/O synchronous transmission and reception, fast command response speed
2. Strong and weak electrical zoning wiring to reduce crosstalk between signals
3. Slot direct insertion installation, easy to disassemble and replace on site
1. Adapt to TEL etching and deposition series machine main control bus communication
2. Integrate multiple pressure and temperature sensing signal acquisition channels
3. Built in overcurrent and overvoltage protection to prevent module damage caused by abnormal loads
4. Wide temperature working design, able to withstand continuous high temperatures inside the equipment for a long time
5. Gold plated connector, repeatedly inserted and removed to maintain reliable contact
1. Valve and gas path logic control of semiconductor etching equipment chamber
2. Collection and processing of pressure and temperature signals for wafer deposition equipment
3. Replacement and repair of the original controller module of TEL machine due to malfunction
4. Signal interaction of semiconductor process equipment in clean workshop
5. Semiconductor process chamber actuator linkage control
This TEL 3M80-004350-13 is a semiconductor original factory dedicated board with stable communication and strong adaptability. It is commonly used for replacing spare parts in old TEL wafer equipment