TEL 3R81-000037-12 Input/Output Module  

#TEL 3R81-000037-12 Input/Output Module

TEL 3R81-000037-12 is a dedicated digital IO module for semiconductor equipment, used for on-site signal acquisition and output control of machines.

1. Adapt to TEL semiconductor process equipment bus and communicate with the main control system
2. Multiple digital input and output channels, collecting signals from switches and sensors
3. Channel optoelectronic isolation to reduce the impact of on-site electromagnetic interference
4. Real time uploading of equipment status signals such as valves, pump bodies, and door controls
5. Support emergency stop and safety door signal detection to achieve safety interlock
6. Each channel is equipped with LED indicator lights to quickly view the channel status
7. Board type structure, direct installation of chassis slots, easy disassembly and assembly
8. 24V DC power supply, suitable for semiconductor cabinet power supply conditions
9. Signal filtering processing to avoid false triggering of signal interference
10. Fault status feedback to the main control, facilitating equipment alarm diagnosis
11. Tolerate dust-free workshop environment and components resistant to dust pollution
12. Fast signal response speed, matching process timing control requirements
13. Standardized board interface, direct replacement with original spare parts from the factory
14. Support multi module networking and flexible expansion of IO points
15. Meet 24-hour continuous operation and ensure stable operation of process equipment

The TEL 3R81-000037-12 input/output module is mainly used for etching and CVD equipment to complete on-site signal acquisition and logic control, ensuring the execution of machine process flow.