TEL CX81-050039-V2 Controller Module  

TEL CX81-050039-V2 Controller Module

1. TEL Semiconductor Equipment Dedicated Process Control Module
2. Execute cavity logic control and process on-site signals
3. Built in filtering to suppress plasma electromagnetic interference
4. Optoelectronic isolation to prevent surge damage to the board
5. LED indicator light, quickly locate hardware faults
6. Backboard slot, easy to disassemble and replace operation
7. Industrial components, supporting 7 × 24-hour operation
8. Electrostatic overvoltage protection to reduce device damage
9. Bus communication, exchanging data with the upper computer
10. Local storage of process parameters, no loss during power outage
11. Multiple protection, abnormal triggering of equipment interlocking
12. Anti vibration, adapted to equipment vibration conditions
13. Single channel independent operation, no downtime due to local faults
14. Wide temperature operation to adapt to temperature fluctuations in the cabinet
15. Original factory specifications, matched with TEL’s complete set of process equipment
TEL CX81-050039-V2 controller module, responsible for semiconductor equipment cavity logic operation, signal processing, and process control.