TEL F17-621561-2 Ultrasonic Flow Meter  

TEL F17-62151-2 ultrasonic flowmeter, a fluid monitoring instrument for Tokyo Electronic Semiconductor Equipment, collects process pipeline liquid flow data in a time difference manner.
Product Features:
1. No mechanical moving parts, no pressure loss, and no disturbance to the process fluid
2. Equipped with signal filtering, resistant to radio frequency electromagnetic interference, suitable for semiconductor cabinet working conditions
3. Supports bidirectional flow detection and can identify the reflux status of the medium
4. Built in self checking function, quick fault identification, low maintenance workload
5. Compact body, original factory standard interface, easy to replace and disassemble directly
Product Parameters:
1. Measurement principle: Time difference ultrasonic testing
2. Power supply: DC24V
3. Working temperature: 5-45 ℃
4. Output: Analog flow signal output
5. Adaptation: TEL etching, thin film process equipment pipelines
Application fields:
1. TEL semiconductor machine process liquid flow monitoring
2. Flow control of cooling circuit for etching equipment
3. Fluid circuit measurement of thin film deposition equipment
4. Replacement of spare parts for semiconductor equipment in case of malfunction
5. Fluid closed-loop monitoring of vacuum process equipment
Overall, TEL F17-62151-2 ultrasonic flowmeter is a semiconductor specific flow detection component that ensures accurate and stable measurement of process fluid flow.