TEL Tokyo Electron 1B80-002389-11 Sensor Module

Product manual:

TEL Tokyo Electron 1B80-002389-11 Sensor Module
It is a key detection component designed specifically for semiconductor manufacturing equipment, used to collect environmental or equipment operating parameters, and achieve precise monitoring and control of the process.
This module typically integrates multiple sensor types, supports signal conditioning and digital/analog output, ensuring that the system can respond in real-time to changes in key parameters.

1、 Basic Product Information
Project Content
Product model 1B80-002389-11
Product Name: Sensor Module
Manufacturer Tokyo Electron Ltd. (TEL)
Module type: Multi functional signal acquisition and sensor interface module

2、 Core functions and roles
Detailed description of functional categories
Multi sensor integration supports multiple sensor input interfaces such as temperature, pressure, humidity, gas flow, etc.
Signal conditioning amplifies, filters, and converts the weak electrical signals output by sensors.
The data output provides standard analog voltage/current output or digital signal transmission, making it easy to interface with the main control system.
Real time monitoring continuously collects environmental and equipment parameters to achieve precise control of the process.
The alarm function can be configured with threshold alarms to promptly prompt abnormal states.

3、 Typical application areas
Specific purpose of the application system
The vacuum system monitors the vacuum sensor signal to ensure the sealing of the equipment chamber.
The gas supply system collects signals from mass flow meters (MFCs) and pressure sensors to control the gas flow rate.
The temperature control system receives signals from thermocouples or RTD temperature sensors for heating or cooling regulation.
The safety interlock system monitors signals from safety sensors such as door switches and gas leaks.

Product details picture:

More related products:

6ES7316-1AG00-0AB0processor

DS200SHVMG1AGE sensor device

DS200SIOCG1AEA Analog Output Module

More product recommendations:

Teknic SST-1500-XCX Digital Servo Drive

Metrix 5533-104 Sensor

ABB SB822 3BSE018172R1 rechargeable