TEL Tokyo Electron 1B80-002390-11 Valve Area Plate

Product manual:

TEL Tokyo Electron 1B80-002390-11 Valve Area Plate - Product Application Fields
Gas flow path management and distribution
This valve area board is used for precise control of gas flow and distribution in various process areas inside semiconductor equipment,
Ensure stable supply of process gases as required.

Regional valve control
Responsible for opening and adjusting valves in multiple areas of the equipment,
Control gas flow and pressure to maintain stable process conditions.

Automation system integration
As an important component of equipment automation control system,
Collaborate with the main control system to achieve centralized management and monitoring of multi zone valves.

Fault monitoring and safety interlocking
Real time monitoring of valve status and abnormal gas flow path,
Trigger alarms and safety interlocks when abnormalities occur to ensure the safety of equipment and personnel.

Modular design facilitates maintenance
Adopting a modular structure, it facilitates quick replacement or upgrade during equipment maintenance,
Improve the maintainability and reliability of equipment.

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