TEL Tokyo Electron 2981-600410-11 Relay Board

Product manual:

product name
TEL Tokyo Electron 2981-600410-11 Relay Board
Type: Relay Control Module/Relay Interface PCB
Manufacturer: Tokyo Electron Ltd. (TEL)

1、 Product Function Overview
The 2981-600410-11 relay board is an electrical control component in TEL semiconductor equipment, mainly used to implement:

Electrical isolation and amplification of control signals

Switching control of medium to high power loads (such as pumps, valves, motors, etc.)

By triggering the relay through the main control or PLC signal, the power circuit can be closed or cut off

Linkage with safety interlock mechanism to control critical equipment status during abnormal or startup processes

2、 Typical application areas
This relay board is widely used in various semiconductor process equipment of TEL, including:

1. Gas transportation and MFC control system
Control the opening/closing of solenoid valves in gas channels

Hardware control actions for implementing process gas ratio logic

2. Vacuum chamber control system
Control the operating status of equipment such as vacuum pumps, vacuum valves, pressure protection devices, etc

Realize automatic control of "vacuum maintenance" or "exhaust" processes

3. Wafer Handling System (Load Port/Transfer Module)
Control the lifting platform, robotic arm, positioning mechanism and other components

Trigger action execution mechanism and provide hardware feedback path

4. Heat treatment and cooling system
Control the power supply of the heater, cooling fan, or liquid cooling pump

Implement switch logic linkage of temperature control subsystem

Product details picture:

2981-600410-11

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