TEL Tokyo Electron 2981-600652-W1 Control Motherboard Card

Product manual:

Product model: TEL Tokyo Electron 2981-600652-W1
Type: Main Control Board/Controller PCB
Functional positioning: The central control circuit board in semiconductor equipment, responsible for overall equipment operation management, process control, and communication coordination

1、 Product Function Overview:
2981-600652-W1 is a control motherboard card developed by Tokyo Electron (TEL) for its high-end semiconductor manufacturing equipment,
As the core of the overall control system, it undertakes key control tasks such as signal processing, logical operations, data communication, and instruction distribution.
This card is usually installed in the main control rack of the equipment and connected to multiple I/O modules, processor modules, communication boards, etc. through a backplane.

2、 Main application areas:
Central Control Unit

Used in various TEL devices such as etching machines, deposition equipment, cleaning equipment, etc,
Control the operation process and status feedback of each subsystem.

Process execution logic management

Execute embedded control programs to achieve device action sequence control
Process parameter setting and dynamic adjustment, such as temperature, gas flow rate, chamber pressure control, etc.

Multi module coordinated control platform

Collaborate with multiple daughter cards (such as I/O modules, power control modules, sensor interface boards),
Perform signal acquisition, distribution, and real-time response.

Core communication interface between devices

Realize communication coordination between internal and external devices, such as with the upper computer (HMI)
Instruction communication between remote servers and Manufacturing Execution Systems (MES).

Human-machine interaction control

Receive operation instructions from the touch screen or local control terminal,
And provide feedback on process status, alarm information, operation logs, and other data.

Self check and fault diagnosis function

Integrate functions such as error code management, watchdog mechanism, hardware status monitoring, etc,
Improve equipment operation safety and fault maintenance efficiency.

Product details picture:

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