TEL Tokyo Electron 2L81-050032-V3 processor board

Product manual:

1、 Basic Information
Product model: 2L81-050032-V3

Product Name: Processor Board/Control Motherboard

Manufacturer: TEL - Tokyo Electron Limited

Product type: CPU motherboard for embedded control systems

Version number: V3 (representing the third edition or hardware revision version)

2、 Main functions
Function Category Function Description
The central control function undertakes the main control tasks of the system, processing control logic and data exchange from various modules.
Task scheduling and communication management involve the control signal transmission and reception of multiple device subsystems to achieve coordinated operation of devices.
The interface supports the ability to connect with external I/O boards, communication modules, sensors, etc.
Real time data processing involves high-speed collection and processing of sensor data, responding to external events and status changes.

3、 Typical application areas
This processor board is commonly used in TEL's high-end wafer manufacturing equipment, such as:

Photolithography pre-processing/post-processing equipment (Coater/Developer)

Control the developing unit, liquid pumping system, baking unit, vacuum adsorption device, etc.

CVD/Etch system (chemical vapor deposition, etching equipment)

Manage functions such as temperature control module, vacuum system, gas channel, power control, etc.

Loading port/Transfer Module

Control the wafer transfer robotic arm, lifting device, stage alignment mechanism, and other components.

Data Collection and Communication Subsystem

Perform high-speed data communication with the upper control system (such as TEL's original factory control system).

Product details picture:

2L81-050032-V3

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