TEL Tokyo Electron 3Z81-000011-V1 Interface Board

Product manual:

TEL Tokyo Electron 3Z81-000011-V1 Interface Board
It is a dedicated signal conversion and connection module used in TEL semiconductor manufacturing equipment,
Used to achieve data communication, electrical interface bridging, and signal isolation protection between the main control system and sub modules,
Plays a critical central connecting role in the normal operation of the device.

1、 Basic Information
Product Name: Interface Board

Product model: 3Z81-000011-V1

Manufacturer: Tokyo Electron Ltd. (TEL)

Board functions: signal connection, relay, protocol conversion, electrical isolation, etc

Deployment location: inside the main control cabinet, equipment backplane slot, I/O control rack

2、 Main functions
Multi signal type connection

Provide multiple signal input/output interfaces to connect sensors, drivers, actuators, etc.

Supports multiple types of signal access, including TTL, differential signal, analog voltage, and relay contacts.

The bridge between the main control and subsystems

Implement data transmission and reception between the main control board (such as CPU card, control motherboard) and external signal devices.

Support functions such as serial communication, parallel signal, digital/analog conversion, etc.

Electrical isolation and anti-interference

The interface is equipped with optocouplers, electrical isolation or filtering protection to ensure signal integrity and EMI resistance.

Reduce the risk of signal conflicts and false triggering.

System compatibility and scalability

As a modular board design, it facilitates system upgrades, replacements, or functional extensions.

3、 Typical application scenarios
Example of Application Device Type Interface Board Function
The Etcher system is connected to the vacuum valve controller, pressure sensor, and door lock signal feedback
The CVD/ALD system is connected to temperature sensors, heating control units, alarm modules, etc
Track equipment interfaces with motor drive signals, photoelectric sensors, and limit switches
Transfer module transfers feedback signals of robotic arm status, transmission position detection signals, etc

Product details picture:

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