TEL Tokyo Electron MPC-T0070A-14 Digital Input Module

Product manual:

1、 Basic Information
Product model: MPC-T0070A-14

Product Name: Digital Input Module

Manufacturer: Tokyo Electron Limited (TEL)

Module category: Industrial control I/O interface board (input specific)

Version number: -14 represents the 14th hardware revision version of the module, adapted to specific devices or system platforms

2、 Main functions
This module is used to collect digital signals on site and provide critical status feedback for the equipment control system

Function item description
Status signals (such as on/off) of buttons, limit switches, proximity sensors, etc. in switch quantity acquisition devices
Real time monitoring system for binary status information such as door status, safety lock, mechanical position, etc
Input filtering is used to filter mechanical jitter or transient interference, improving signal stability and accuracy
The system communication encodes the input signal and sends it to the upper control system through the bus protocol

3、 Typical application scenarios
This module is widely used as a front-end unit for state detection in various semiconductor devices of TEL, such as:

ACT series lithography pre-processing equipment

Detect the status of the wafer stage, pneumatic door switch, wafer in position signal, etc

Tactras series etching system

Collect chamber door lock opening and closing, vacuum status detection switch, and fault signal feedback

Trias series sedimentary system

Detecting the mechanical motion status of the furnace body, gas on/off feedback, cooling channel feedback signals, etc

4、 Module features
High density digital input channel design, space saving and simple wiring

Each input has independent protection and filtering to enhance the system's anti-interference ability

Industrial standard TTL/24V input signal compatibility, suitable for various industrial sites

TEL dedicated hardware interface and signal protocol ensure high system integration

Product details picture:

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