Thermo 97055-51180 RF Thermal Generator

The Thermo 97055-51180 RF thermal generator is a semiconductor analysis equipment RF power generation unit that outputs controllable RF energy to achieve cavity heating and ion source driving.
Product Features
1. Integrated structure of the whole machine, cabinet style installation, suitable for equipment rack layout
2. Power closed-loop regulation, automatically stabilizing RF output during load fluctuations
3. Built in standing wave protection, quickly cuts off power output in case of abnormal load
4. Real time temperature and power monitoring, which can be reported to the equipment control system
5. Modular and maintainable design, convenient for on-site maintenance and replacement of parts
Product Parameters
1. Power supply 208-240VAC industrial AC input
2. The RF power is continuously adjustable and supports the storage and retrieval of process parameters
3. Operating temperature range of 10-50 ℃, suitable for analytical instrument cabinet environment
4. The communication interface supports device bus and enables upper computer linkage control
5. Equipped with multiple hardware protections for over temperature, over current, standing wave, etc
Application Areas
1. Thermo mass spectrometry analysis equipment RF heating drive unit
2. RF heat source supply for semiconductor analysis instrument cavity
3. Replacement and maintenance of spare parts for laboratory analysis equipment failures
4. Supporting project for ion source RF drive system
5. Renovation and debugging of second-hand analytical instruments
Thermo 97055-51180 RF thermal generator has stable output power, ensuring the normal operation of the thermal environment and ion source in the analysis equipment chamber