Varian E111082T0 Pneumatic Interface Module  

Varian E111082T0 pneumatic interface module, vacuum semiconductor equipment gas electric integrated interface unit, realizes the transfer of solenoid valve control signals and gas path.
Product Features
1. Integrated gas circuit, reducing on-site wiring of gas pipeline harnesses
2. The sealed structure is suitable for vacuum equipment, with low leakage rate and meeting the working conditions of the chamber
3. Onboard signal isolation to resist machine electromagnetic interference and ensure stable signal transmission
4. Integrated structure of connectors, high efficiency in disassembling and replacing spare parts
5. Industrial corrosion-resistant material, suitable for long-term continuous operation in clean workshops
Product Specifications
1.24VDC electrical power supply
2. Multiple pneumatic pathways and electrical signal interfaces
3. Working pressure 0-0.7MPa
4. Working temperature 0-60 ℃ Clean room working conditions
5. Adapt to Varian vacuum process equipment bus
Application Areas
1. Pneumatic circuit transfer of vacuum coating equipment
2. Process chamber door valve, cylinder pneumatic control interface
3. Gas electric signal interaction unit for semiconductor vacuum equipment
4. Gas path control module for ion implantation equipment
5. Varian equipment spare parts maintenance and replacement
In the scenario of vacuum equipment maintenance and replacement, Varian E111082T0 ensures reliable interaction between gas circuit continuity and electrical control signals