VAT 02112-AA44-0001 Rectangular Gate Valve    

VAT 02112-AA44-0001 Rectangular Gate Valve
1. Rectangular straight channel with high conductivity, convenient for wafer transfer and passage
2. The bellows isolation drive rod effectively prevents external gas from infiltrating the vacuum chamber
3. Equipped with a mechanical self-locking structure, it maintains its sealing effect even in a gas cut state
4. FKM fluororubber seals, resistant to various process corrosive gases
5. 316L stainless steel valve body, low gas output, meets semiconductor cleanliness standards
6. Pneumatic dual drive, smooth opening and closing action, low vibration during operation
7. Built in limit switch that can output real-time valve opening and closing status signals
8. Low particle precipitation structure reduces the risk of wafer contamination on the production line
9. Long cycle life, capable of withstanding millions of frequent opening and closing operations
10. Adapt to various vacuum chambers for load locking, etching, and thin film deposition
11. Compact body structure, saving installation space inside the equipment
12. Standard flange interface, easy to disassemble, repair and replace operation
13. Suitable for ultra-high vacuum conditions, with extremely low leakage rate in sealed chambers
14. Capable of plasma resistance, resisting erosion and loss caused by process gases
15. Standardized electrical interface, which can be directly linked with the equipment main control system
VAT 02112-AA44-0001 rectangular gate valve belongs to semiconductor vacuum special valve components, with reliable sealing and high cleanliness, ensuring stable operation of vacuum chamber isolation control.