VAT 61234-KEAP-AQN Control Butterfly Valve System   

VAT 61234-KEAP-AQN is an integrated vacuum controlled butterfly valve system used for closed-loop pressure regulation of vacuum pipelines, suitable for semiconductor process equipment
Product Features:
1. Integrated drive controller to achieve precise closed-loop control of vacuum pressure
2. The valve position adjustment responds quickly to meet the dynamic pressure regulation requirements of the process
3. Double sealed rotating feedthrough structure, low vacuum leakage rate of the whole machine
4. Equipped with valve position feedback output, supporting real-time status monitoring by the upper computer
5. Modular actuator, easy disassembly and maintenance, reduces downtime
Product Parameters:
1. Power supply voltage DC24V
2. Pressure range 1 × 10 ⁻⁸ mbar -1.2 bar
3. DN50 nominal diameter ISO KF flange
4. The maximum temperature resistance of the valve body is 150 ℃
5. Communication interface RS485 logic interface
Application fields:
1. Vacuum pipeline pressure control of semiconductor etching equipment
2. CVD thin film deposition process chamber pressure regulating unit
3. Vacuum process pipeline for flat panel display devices
4. Vacuum flow regulation of photovoltaic coating equipment
5. Downstream pressure regulation of high-end industrial vacuum systems
The VAT 61234-KEAP-AQN control butterfly valve system has stable performance and is the core regulating component for rigorous vacuum processes