VAT 65048-JH52-AQK gate valve motor   

VAT 65048-JH52-AQK is a vacuum swing valve stepper drive motor component that controls the valve plate opening and regulates the vacuum flow in the chamber.
Characteristics
1. Stepper motor drive, high positioning accuracy of valve plate
2. Built in encoder, real-time feedback of valve position status
3. Equipped with a fail safe mode, maintain valve position when powered off
4. Support analog and remote digital signal control
5. Original integrated structure, easy disassembly and replacement
parameter
1. Step by step closed-loop drive structure
2. Feedback loop of valve position encoder
3. Support external upper computer signal interaction
4. Cabinet operating temperature 0-50 ℃
5. Compatible with VAT65048 series vacuum swing valve body
Application
1. Pressure regulation of semiconductor etching chamber
2. Vacuum control of thin film deposition equipment
3. Replacement of spare parts for vacuum process machine valves
4. Repair of wafer equipment hardware faults
5. Technical renovation and maintenance of old semiconductor machines

When the chamber pressure is out of control and the valve is in abnormal position, VAT 65048-JH52-AQK is the priority driving component for inspection.