VAT A-1141997 gate valve motor  

VAT A-141997 vacuum gate valve motor, semiconductor vacuum gate valve dedicated drive component, controls valve opening and closing actions.
Product Features
1. Compatible with VAT vacuum gate valve, integrated with VATLOCK mechanical locking structure
2. Equipped with mechanical position indication and supporting remote signal feedback monitoring
3. Resistant to vacuum chamber conditions and slight corrosion from process gases
4. Compact structure, easy replacement and disassembly of original spare parts directly from the factory
5. Rapid action response to ensure stable logic of cavity on/off
Product Specifications
1. Electromagnetic valve power supply 24VDC
2. Power consumption is about 5.4W
3. Maximum working temperature of 80 ℃
4. Can withstand a maximum pressure difference of 1.6 bar
5. Suitable for 1 × 10 ⁻⁷ mbar high vacuum environment
Application Areas
1. Vacuum gate valve drive for semiconductor process machine
2. Isolation valves for PVD and CVD equipment chambers
3. On/off control of wafer transfer vacuum pipeline
4. Valve execution of photovoltaic vacuum coating equipment
5. Maintenance and replacement of spare parts for imported vacuum equipment
During the maintenance and replacement of vacuum chamber valves, VAT A141997 ensures the reliable opening and closing locking of vacuum gate valves