VAT A-2352575 actuator  

This VAT A-2352575 actuator is a pneumatic drive unit for Swiss VAT vacuum gate valves, and is commonly used for semiconductor vacuum chamber maintenance
Product Features
1. Original factory matching drive components, directly matched with VAT vacuum gate valve, with strong compatibility for in-situ replacement
2. Equipped with a position feedback sensor, it outputs real-time valve opening signals with high positioning repeatability
3. Fault safety design, the valve automatically enters the safe position after the gas is cut off, protecting the vacuum chamber
4. Corrosion resistant material that can withstand various process gases and adapt to semiconductor process environments
5. Compact structure, easy disassembly and assembly, on-site maintenance does not require dismantling the entire cavity
Product Specifications
1. Model: VAT A-2352575
2. Type: Vacuum gate valve pneumatic actuator
3. Drive air source: 4-8 bar clean compressed air
4. Built in: valve position feedback detection component
5. Applicable operating conditions: high vacuum semiconductor process chamber
Product application areas
1. Semiconductor etching machine, process chamber vacuum gate valve opening and closing drive
2. Thin film deposition equipment, chamber vacuum pressure regulation and control
3. Vacuum coating equipment, pneumatic gate valve action execution
4. Wafer processing equipment, vacuum chamber isolation valve drive unit
5. Maintenance of old semiconductor production lines, replacement of faulty vacuum valve actuators and spare parts
Overall, the VAT A-2352575 actuator is the core driving spare part for controlling vacuum gate valves in semiconductor vacuum process equipment