Yaskawa XU-RC350S-J01 Wafer Robot  

Yaskawa XU-RC350S-J01 wafer manipulator is an Yaskawa vacuum dual arm manipulator used for wafer handling and transfer in semiconductor machines
Product Features
High repeatability positioning accuracy protects the wafer from scratches
Low dust output meets the requirements of clean vacuum environment
Dual arm structure for higher efficiency in handling
Smooth operation with minimal vibration
Equipped with fault monitoring for easy maintenance
Application Areas
Semiconductor etching equipment wafer transfer
Thin film deposition equipment for wafer loading and unloading
Ion implantation machine wafer handling unit
Internal wafer transfer in wafer testing equipment
Vacuum wafer conveying for lithography equipment
Wafer cleaning machine picking and placing mechanism
Chemical vapor deposition equipment transfer film
Plasma processing equipment wafer transfer
Wafer transportation before semiconductor packaging
Material vacuum testing wafer transfer
Overall, Yaskawa XU-RC350S-J01 wafer manipulator is a core wafer transfer component in semiconductor process equipment with high cleanliness, stability, and precision