AMAT Applied Materials 0100-9066 Gas Panel Analysis Module
Product manual:
AMAT 0100-9066 Gas Panel Analysis Module
Product application areas
Semiconductor manufacturing process equipment
Applied in etching (Etch), chemical vapor deposition (CVD, PECVD, ALD), physical vapor deposition (PVD), chamber cleaning and other processes.
By precise analysis and control of gas flow rate, pressure, and composition, process stability and repeatability are ensured.
Process gas monitoring and diagnosis
Used for real-time monitoring of gas purity, concentration, and abnormal leakage situations.
Combined with the control system of the equipment, perform closed-loop feedback to prevent process deviations.
Predictive Maintenance and Equipment Health Management
By analyzing gas data, engineers can identify potential issues with valves, pipelines, or MFCs (Mass Flow Controllers) in advance.
In the maintenance and calibration process, it serves as a diagnostic tool to ensure the long-term operation of equipment.
Advanced materials and device research and development
Used in experimental lines or R&D platforms for multi gas combination experiments, precision gas blending, and reaction process analysis.
Especially suitable for advanced processes that require extremely high gas conditions, such as high dielectric constant material deposition, low-k media, and compound semiconductor processes.
Display and Optoelectronic Industry
Gas supply and analysis module applied to production equipment such as TFT-LCD, OLED, solar thin film cells, etc.
Ensure the uniformity and stability of thin film deposition and etching processes.
MEMS and Sensor Manufacturing
Ensure precise gas control during microstructure processing in the etching, deposition, and packaging stages of MEMS devices.
Reduce yield decline caused by gas anomalies.
AMAT Applied Materials 0100-9066 Product details picture:
0100-9066
AMAT Applied Materials 0100-9066 product video
More related products:
DIZ232.1 (029.223004) counter module
SST-PFB3-VME2 (029.362754) communication module
DAP232 (590.043150) digital output module
More product recommendations:
IS230STAOH2A module
IS230TDBTH6A module
SK829007-B Protector module
