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TEL Tokyo Electron 3D80-00157-23 Power Supply Unit

TEL Tokyo Electron 3281-000138-12 Control Board

TEL Tokyo Electron 381-500244-3 Memory Board

TEL Tokyo Electron 3281-000172-13 Input/Output Interface

TEL Tokyo Electron 381-640841-3 Digital Input Module

TEL Tokyo Electron 2981-600534-1 Printed Circuit Board

TEL Tokyo Electron 381-64060-1 restriction board

TEL Tokyo Electron 381-639506-4 restriction board

TEL Tokyo Electron 3M08-027471-11 Interface Module

TEL Tokyo Electron 3281-000085-12 power connector

Novellus Systems 02-00315-01 Interface Module

KLA Tencor 710-659274-00 Single Axis Controller