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AMAT Applied Materials 0190-48491 Adapter

AMAT Applied Materials 0190-48491 Adapter

Product manual:

AMAT Applied Materials 0190-48491 Adapter (Ion Meter Component) Product Application Fields
1、 Product Overview

AMAT Applied Materials 0190-48491 is a dual filament thermal ionization meter
Dual Filament Hot Ion Gauge components are commonly used as pressure detection sensors in vacuum systems.
This component is capable of measuring pressure within the range of high vacuum to ultra-high vacuum,
Vacuum monitoring and feedback control systems commonly used in semiconductor process equipment.

It belongs to the core vacuum measurement and control component in AMAT (Applied Materials Company) equipment,
Especially used for high-density plasma (HDP) CVD and PVD process platforms,
Series such as AMAT HDP100, Endura, Centura, etc.

2、 Technical characteristics

Type: Dual Filament Hot Cathode Ion Gauge

Measurement range: approximately 10 ⁻⁵ to 10 ⁻⁹ Torr

Output signal: 0.8-10 V analog voltage signal

Installation method: Standard vacuum flange interface (installed in conjunction with the vacuum system chamber)

Application features: high sensitivity, fast response speed, and long-term stable operation under harsh vacuum conditions

Often used in conjunction with vacuum controllers, power modules, and vacuum pump systems to form a closed-loop pressure control system

4、 Product advantages

Dual filament design: prolongs service life, automatically switches when one filament ages, and improves system reliability.

High sensitivity and wide range: capable of accurately measuring extremely low pressures, meeting the requirements of ultra-high vacuum environments.

Fast response speed: able to reflect real-time changes in chamber pressure, facilitating quick feedback and closed-loop control.

Strong compatibility: Suitable for various AMAT vacuum platforms and universal vacuum measurement and control systems.