AMAT Applied Materials 03-81723-00 Motor Driver Assembly Module

Product manual:

Product application areas

Motion Control of Semiconductor Manufacturing Equipment

Applied to AMAT's deposition (CVD, PVD), etching, ion implantation and other process equipment.

Responsible for driving the internal motors of the equipment and achieving precise mechanical motion control.

Wafer Handling and Transport System

During the transfer process of the wafer from the loading end to the process chamber, and then to the unloading end,
The motor driver controls the rotation, lifting, and gripping actions of the handling robotic arm.

Ensure stable and particle free transfer of wafers in vacuum chambers or atmospheric environments.

Opening and closing control of valves and vacuum chamber doors

Mechanical components such as switch valves and slide valves used to drive the chamber.

Ensure highly reliable opening and closing actions during vacuum isolation or process switching between chambers.

Wafer Alignment and Rotation System

Applied to wafer orienters and rotary tables, it helps to accurately align the direction and position of wafers before processing.

Carrier box and process tray mechanism

Control the entry, exit, positioning, and handling of wafer carriers.

The driver provides motion power for components such as trays and fixtures, achieving automated loading and unloading functions.

AMAT Applied Materials 03-81723-00 Product details picture:

AMAT Applied Materials 03-81723-00 product video

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