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AMAT Applied Materials 0500-01065 Interface Module

AMAT Applied Materials 0500-01065 Interface Module

Product manual:

AMAT Applied Materials 0500-01065 Interface Module
Product application areas

1、 Semiconductor Manufacturing Equipment Platform

Mainly used in the AMAT Centura series 300 mm process platform.

The Loadlock interface interlock module belonging to multi chamber equipment is responsible for the safe transition between atmospheric and vacuum chambers.

2、 Core application scenarios

Wafer transfer process

Control and monitor the switch status of the Loadlock cabin door.

Vacuum and atmospheric isolation

Provide interlocking logic with vacuum pumps and valves to avoid vacuum failure caused by misoperation.

Security interlock logic

When the door is not locked, the pressure is unbalanced, or the sensor is abnormal, prevent direct communication between the chamber and the outside or other chambers.

Provide protection logic to prevent wafer contamination or equipment damage.

Signal interface function

As an I/O interface board between Loadlock and the main controller (PLC/system control computer), it transmits door lock status, sensor feedback, and execution signals.

Responsible for collecting and converting interface signals to ensure timely response of the control system.

3、 Typical application areas

CVD (Chemical Vapor Deposition) equipment: used for wafer loading, unloading, and transition before and after thin film deposition processes.

PVD (Physical Vapor Deposition) equipment: used as an intermediate transition module between atmospheric and vacuum chambers in sputtering coating equipment.

Etching equipment: Ensure that the wafer is safely isolated before being transferred to the high vacuum etching chamber.

Cleaning/surface treatment equipment: Ensure that the loading process does not affect the vacuum process environment in processes that require frequent entry and exit of wafers.