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AMAT Applied Materials 9090-00962 Vacuum Control Chassis

AMAT Applied Materials 9090-00962 Vacuum Control Chassis

Product manual:

Product Overview

AMAT Applied Materials 9090-00962 Vacuum Control Chassis is a specialized component used in semiconductor process equipment to carry and manage electronic modules and related interfaces of vacuum control systems. It serves as a chassis framework, providing a unified platform for signal processing, power distribution, and interface wiring of vacuum systems.

Technical characteristics (speculation)

Due to limited public information, detailed parameters are not disclosed to the public. However, based on the design characteristics of similar products and vacuum controlled chassis, their possible features can be summarized as follows:

Structural function: Provide fixed and aligned installation positions for vacuum control modules.

Electrical support: Integrated power distribution, signal cable management, and grounding circuits.

Compatibility: Supports AMAT specific models of vacuum control cards and electronic modules.

Shielding and Safety: Equipped with electromagnetic shielding and grounding design to reduce noise and interference.

Version revision: There are different revision versions (such as Rev. A, Rev. B), which may have slight differences in interface or layout.

Application scenarios

Vacuum System Control in Semiconductor Manufacturing Equipment

For example, process modules such as ion implantation machines, thin film deposition equipment, etching systems, etc. that require high vacuum environments

Electrical and signal interface management for vacuum valves, pressure sensors, and pump control

Centralized distribution and protection of system power and signals

Product advantages

Integrated design: Install multiple vacuum control modules in a centralized manner to improve system wiring and maintenance efficiency

High reliability: The chassis material and design meet the requirements for long-term operation of the vacuum system

Modular maintenance: supports replacing individual modules or circuit cards to reduce downtime

Compatibility: Tailored for specific equipment models of Applied Materials to ensure overall system performance and stability