AMAT DIP-510-005 Interlock Module
Product manual:
AMAT DIP-510-005 Interlock Module
Product Overview
The DIP-510-005 interlock module of AMAT (Applied Materials) is a safety control and signal interlock module applied to semiconductor process equipment.
Technical parameters (typical characteristic directions, specific values need to refer to the original factory data)
Input/output interface: multi-channel digital/analog signal monitoring and interlocking output
Response speed: Supports millisecond level fast interlock actions
Reliability: Industrial grade design, supporting long-term continuous operation
Adaptability: Compatible with various semiconductor device platforms of AMAT, such as PVD, CVD, Etch, etc
Redundant design: equipped with partial fault tolerance and dual channel interlocking function
Application scenarios
Semiconductor front-end process equipment
Equipment for photolithography, etching, ion implantation, thin film deposition (CVD, PVD, ALD), etc.
Ensure gas delivery, vacuum pressure, and power control within safe limits through interlocking logic.
Semiconductor back-end packaging and testing
As a safety signal control module in packaging testing machines, probe stations, and other equipment, it ensures process accuracy and equipment stability.
Vacuum system and gas delivery system
Monitor the pressure, valve status, and gas path connectivity of the vacuum chamber, and immediately trigger interlock in case of abnormalities.
Commonly used for high-purity gas supply and multi-channel gas switching control.
Security linkage between devices
On a large wafer fab production line, multiple devices often need to operate in coordination.
The interlocking module can achieve signal interaction and linkage between devices, avoiding chain accidents caused by single machine abnormalities.
Power and Energy Management
Used for safe disconnection and sequential power on of equipment power systems to prevent damage caused by misoperation or electrical failures.
Provide protective barriers in process energy sources such as high-voltage power supplies, RF power supplies, and heating modules.
AMAT DIP-510-005 Product details picture:
DIP-510-005
AMAT DIP-510-005 product video
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