Gasonics 810-2850-001 Motor Driver Module
Product manual:
product name
Gasonics 810-2850-001 Motor Driver Module
Product application areas
Semiconductor Manufacturing Equipment
This module is mainly used in Gasonics' plasma ashing machines and etching equipment,
Drive the motion control mechanism inside the vacuum chamber, such as the slide arm, rotating platform, electric valve, and other components.
Wafer processing system in photolithography process
In the wafer cleaning and photoresist removal processes before and after photolithography,
This driver module can control the motor actions related to rotation and lifting, ensuring the precision and stability of wafer transfer.
Vacuum system and conveying equipment
Used to control servo or stepper motors in automatic doors, electric push rods, and exhaust devices that interface with vacuum chambers,
Enhance automation level and operate in conjunction with Gasonics pneumatic or electric valve modules.
Motion Control in Plasma Processing Equipment
During the plasma etching or debonding process,
This driver is used to control the motor to perform precise operations such as tray rotation, load lock mechanism opening and closing, and sample up and down movement.
Application of maintenance and replacement of old model equipment
Widely used for maintenance of equipment such as Gasonics Aura 2000, Aura 3010, L3510, etc
Replacement and upgrade are compatible components of the original motor drive system.
Laboratory grade customized equipment and educational purposes
Some universities or research institutions use retired semiconductor equipment for teaching or experimentation,
Keep this module as a teaching example or motion control unit.
Product details picture:
Gasonics 810-2850-001
More related products:
500BIO011MRB150005R1Jinvertercontrolunit
531X307LTBAKG1 power interface card module
More product recommendations:
ASEA 57360001-AN circuit board
