Gasonics 853-4290-101 Load Lock Elevator Module
Product manual:
Product Name: Gasonics 853-4290-101 Load Lock Elevator Module
Functional positioning: Key actuator for load lock chamber wafer lifting control in semiconductor equipment
1、 Semiconductor wafer processing system
This module is widely used in Gasonics Aura plasma cleaning equipment, responsible for transferring wafers from atmospheric environment to vacuum environment, achieving wafer lifting and precise alignment.
Typical use:
Handling of loading and unloading materials before wafer cleaning, ashing, and debonding
Wafer transfer between load lock and processing chamber
Ensure high-precision wafer lifting operation under vacuum conditions
2、 Vacuum automatic transmission system
In plasma processing equipment, this module is often used in conjunction with robotic arms or transfer platforms to perform the function of vertical movement of wafers in negative pressure environments.
Applicable scenarios:
Loading and unloading docking in multi chamber processing system
Preparation for transportation before wafer pre-processing or post-processing
Connect and interface with AMHS system and front-end FOUP interface
3、 Cleaning steps before and after photolithography process
The load lock elevator module is used for surface treatment steps before and after the photolithography process to ensure the cleanliness of the wafer surface and avoid particle contamination.
Specific application:
Pre lithography degreasing and cleaning
Removal of residues after photolithography
Wafer transfer lifting between multi-layer processes
Product details picture:
853-4290-101
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