Gasonics 90-1033-02 Temperature Control Card
Product manual:
product name
Gasonics 90-1033-02 Temperature Control Card
Product application areas
Semiconductor equipment temperature control system
Mainly used in semiconductor manufacturing equipment such as plasma cleaning machines and ashing equipment from brands like Gasonics,
Accurately control the temperature of the process chamber to ensure stable cleaning and etching processes.
Vacuum chamber temperature regulation
During plasma processing in a vacuum environment, the temperature control card can adjust the output of the heating element through a feedback mechanism,
Maintain a constant temperature on the surface of the cavity or workpiece to avoid thermal drift.
Plasma ashing process control
Used to control the temperature curve of the heating area in the reaction chamber, ensuring temperature stability during the photoresist removal process,
Improve processing consistency and yield.
Temperature stabilization system for heat treatment platform
Suitable for controlling temperature control components such as heating tables and hot plates, achieving multi-point temperature monitoring and closed-loop regulation,
Improve the uniformity of heat treatment.
Industrial automation temperature regulation
In some automation systems integrated with Gasonics equipment,
This card may also be used for precision temperature control applications in industrial processes, such as material preheating systems in automated chemical plants.
Market for equipment maintenance and replacement parts
As a key control component of Gasonics original equipment, it is commonly used for equipment maintenance, spare parts replacement, and system upgrades,
To maintain the equipment operating at its optimal state.
Product details picture:
90-1033-02
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