Gasonics 95-4477 Stripping Module
Product manual:
The Gasonics 95-4477 stripping module is a plasma ashing equipment module commonly used in semiconductor manufacturing processes. It is a key component in Gasonics plasma systems and is mainly used to remove photoresists and other organic residues.
1、 Product Overview
The Gasonics 95-4477 stripping module is the core functional component of Gasonics' plasma stripping equipment,
Usually installed in the plasma reaction chamber, responsible for stable ashing, cleaning and other operations in the plasma environment.
This module has characteristics such as high temperature resistance, corrosion resistance, and uniform distribution of plasma.
2、 Application Fields
Semiconductor Manufacturing
Used for removing photoresist during wafer processing
Remove etching residues, clean the surface, and ensure the accuracy of the next process step
Integrated Circuit (IC) Packaging Process
Removing organic residues before IC packaging to improve packaging quality
Manufacturing of Micro Electro Mechanical Systems (MEMS)
During the release process of MEMS structures, a stripping module is used to remove sacrificial layer materials
Flat Panel Display (FPD) Manufacturing
Remove residual adhesive from the display panel after photolithography to improve yield
Manufacturing of solar cells
Ashing treatment of silicon wafer surface to improve subsequent metallization contact performance
Compound semiconductor manufacturing (such as GaAs, SiC, GaN, etc.)
Peel off the organic layer on the surface of the material to ensure high-quality interface cleanliness
3、 Product advantages
High ion uniformity: achieving uniform peeling of wafer surface
Modular design: convenient for replacement, maintenance, and system upgrades
Corrosion resistant material: suitable for environments containing corrosive gases such as oxygen and fluorine
Good compatibility: Suitable for multiple Gasonics stripping systems, such as Aura series, L3510, etc
Product details picture:
95-4477
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